Micro Electro Mechanical Systems (MEMS) (2nd Edition) (Book with DVD)

Microelectromechanical systems (MEMS) are a process technology used to create tiny integrated devices or systems that combine mechanical and electrical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from a few micrometers to millimeters. These devices (or systems) have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale. MEMS can be found in systems ranging across automotive, medical, electronic, communication and defence applications. Current MEMS devices include accelerometers for airbag sensors, inkjet printer heads, computer disk drive read/write heads, projection display chips, blood pressure sensors, optical switches, microvalves, biosensors and many other products that are all manufactured and shipped in high commercial volumes.

This Second Edition of ‘Micro Electro Mechanical Systems (MEMS)’ covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devices presents numerous applications of MEMS. The content has been restructured and revised in this edition.